Engineered substrate for electronics and photonics applications
Date of Issue2017
School of Electrical and Electronic Engineering
The last decade saw a major shift in semiconductor industry constantly thriving for low power and high performance. We have reached to 10nm node which was never imagined a decade ago. The effect of scaling on performance is not significant at lower nodes compared to the cost/transistor. This calls for other candidates like Ge/Si (Germanium on Silicon) replacing standard silicon. This thesis studies and compiles results on epitaxial growth of germanium on silicon, characterization of interface strain/stress, roughness and threshold dislocation density (TDD) which quantify the growth quality of Ge. Characterization techniques include RAMAN, XRD, AFM are performed on the Ge/Si substrate and reported.
DRNTU::Engineering::Electrical and electronic engineering