UV laser micro-machining of MEMS
Yang, Lin Jiang
Gong, Thomas Haiqing
Date of Issue2002
School of Mechanical & Production Engineering
In this report, the performance of two commerically available SU-8 ultra-thick negative phtoresists, SU8-5 and SU8-50, are examined over a thickness range of 13um to 275um in a single resist spin.
Nanyang Technological University