dc.contributor.authorTan, Jun Ping.en_US
dc.date.accessioned2008-09-17T11:15:37Z
dc.date.available2008-09-17T11:15:37Z
dc.date.copyright2001en_US
dc.date.issued2001
dc.identifier.urihttp://hdl.handle.net/10356/6464
dc.description.abstractThe objectives of this project are to produce NiTi thin film that exhibits Shape Memory Effect (SME) onto a cantilever beam and to produce a microgripper of size about 750x350x350 micrometer using the cantilever structure.en_US
dc.rightsNanyang Technological Universityen_US
dc.subjectDRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
dc.titleNiTi shape memory alloy thin film based microgripperen_US
dc.typeThesisen_US
dc.contributor.supervisorHuang, Weimin.en_US
dc.contributor.schoolSchool of Mechanical and Aerospace Engineeringen_US
dc.description.degreeMASTER OF ENGINEERING (MPE)en_US


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