NiTi shape memory alloy thin film based microgripper
Tan, Jun Ping.
Date of Issue2001
School of Mechanical and Aerospace Engineering
The objectives of this project are to produce NiTi thin film that exhibits Shape Memory Effect (SME) onto a cantilever beam and to produce a microgripper of size about 750x350x350 micrometer using the cantilever structure.
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Nanyang Technological University