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      Characterisation of multi-element (Nb, Cr) N thin films deposited by unbalanced magnetron sputtering

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      MAE-THESES_908.pdf (6.705Mb)
      Author
      Tan, Jen Ngee.
      Date of Issue
      2002
      School
      School of Mechanical and Aerospace Engineering
      Abstract
      Tool steels have long been used to manufacture tools for high speed cutting and machining due to its excellent strength, toughness, and heat resistance. However, though the excellent mechanical properties, the tool surface and near surface regions are subjected to the most destructive forces, for example, wear, high stresses, elevated temperatures, and corrosive environments.
      Subject
      DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
      Type
      Thesis
      Rights
      Nanyang Technological University
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      • MAE Theses

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