Job scheduling of batch furnace processing in semiconductor wafer fab using simulation approach.
Subramanian Harhara Subramanian.
Date of Issue2003
School of Mechanical and Aerospace Engineering
Semiconductor wafer fabrication is the most technologically complex and capital intensive phase in semiconductor manufacturing. In semiconductor wafer fab, furnaces are used for diffusion and deposition operations. A furnace is a batch-processing machine, which can simultaneously process a number of lots together as a batch.
Nanyang Technological University