CIM automation in a semiconductor industry - The virtual factory system.
Sim, See Hwa.
Date of Issue2002
School of Mechanical and Aerospace Engineering
This thesis describes the implementation of computer integrated manufacturing (CIM) automation in a Semiconductor Assembly and Test facility. The focus is on the enterprise vision of a Virtual Factory System (VFS) namely factory wide equipment SEMI Equipment Communication Standard/Generic Equipment Model (SECS/GEM) system connectivity and factory wide Automated Material Handling System (AMHS) implementation. (Professor Sivakumar)
Nanyang Technological University