Non-mechanical and instantaneous phase-shifting technique for surface profiling
Narayanswamy R. Sivakumar
Date of Issue2002
School of Mechanical and Aerospace Engineering
In this research work, a novel method is proposed to achieve non-contact surface profile measurement of ultra-flat surfaces. Resolution and accuracy in nanometer range is attained using non-mechanical and instantaneous phase shifting interferometry This work explores the applicability of instantaneous phase shifting technique to a novel common path optical layout.
Nanyang Technological University