A study of the effects of heater surface conditions on heat transfer efficiency in CVD TiN process.
Lye, Tong Meng.
Date of Issue2002
School of Mechanical and Aerospace Engineering
The objective of this project is to shorten the time needed for achieving the process specification by using appropriate chamber conditioning methods and to improve the process performance of the heater by eliminating the “hot spots ” on the heater surface.
Nanyang Technological University