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      A study of the effects of heater surface conditions on heat transfer efficiency in CVD TiN process

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      MAE-THESES_607.pdf (7.727Mb)
      Author
      Lye, Tong Meng.
      Date of Issue
      2002
      School
      School of Mechanical and Aerospace Engineering
      Abstract
      The objective of this project is to shorten the time needed for achieving the process specification by using appropriate chamber conditioning methods and to improve the process performance of the heater by eliminating the “hot spots ” on the heater surface.
      Subject
      DRNTU::Engineering::Mechanical engineering
      Type
      Thesis
      Rights
      Nanyang Technological University
      Collections
      • MAE Theses

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