A study of the effects of heater surface conditions on heat transfer efficiency in CVD TiN process

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Author
Lye, Tong Meng.
Date of Issue
2002
School
School of Mechanical and Aerospace Engineering
Abstract
The objective of this project is to shorten the time needed for achieving the process specification by using appropriate chamber conditioning methods and to improve the process performance of the heater by eliminating the “hot spots ” on the heater surface.
Subject
DRNTU::Engineering::Mechanical engineering
Type
Thesis
Rights
Nanyang Technological University
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