Tape casting of dielectric ALN substrate for microelectronic applications.
Date of Issue2001
School of Mechanical and Aerospace Engineering
The objective of thois project was to develop high performance dielectric AIN multilayered substrate for microelectronics applications using cost-effective starting powders, to obtain a combination of low dielectric constant and reduced density with an improved thermal conductivity, closer CTE match with silicon and high mechanical strength.
Nanyang Technological University