Intelligent hybrid simulation modelling environment for cycle time management of semiconductor wafer fabrication.
Lim, Wei Dong.
Date of Issue2000
School of Mechanical and Aerospace Engineering
Semiconductor wafer fabrication is characterised by capital intensive, multi-stage process, compound of different types of workstations, and re-entrant material flows. Within most wafer fabrication facilities, the cycle time of a wafer is much greater than the processing time. It is desirable to keep the cycle times manageable in the complex wafer fabrication systems.
Nanyang Technological University