dc.contributor.authorLi, Chongxiang.en_US
dc.date.accessioned2008-09-17T11:04:07Z
dc.date.available2008-09-17T11:04:07Z
dc.date.copyright2005en_US
dc.date.issued2005
dc.identifier.citationLi, C. X. (2005). On-line shape measurement using micro-optics. Doctoral thesis, Nanyang Technological University, Singapore.
dc.identifier.urihttp://hdl.handle.net/10356/5978
dc.description.abstractPhysical objects have three dimensional structures(3D). So that a profilometer that produce a 3D profile is invaluable. With the increasing demand for micro-products and bioengineering research, resolutions of 3D profiles with micrometer scale are becoming commonplace. In addition development of large scale production and the real time life science microstructure profile inspection need high-speed display and real-time inspection. The configuration of sensor array detection makes the detection speed much faster than single sensor detection because of sensor array inspects area without lateral scanning. This thesis introduces a multi-channel 3D profile inspection system to realize fast speed inspection with resolution of better than Fiber coupler is introduced in the system as to study and resolve the cross-talk problem.en_US
dc.rightsNanyang Technological Universityen_US
dc.subjectDRNTU::Engineering::Manufacturing::Metrology
dc.titleOn-line shape measurement using micro-opticsen_US
dc.typeThesisen_US
dc.contributor.supervisorAsundi, Anand Krishnaen_US
dc.contributor.schoolSchool of Mechanical and Aerospace Engineeringen_US
dc.description.degreeDOCTOR OF PHILOSOPHY (MAE)en_US
dc.contributor.supervisor2Fang, Zhong Pingen_US


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