Design and simulation of microgyroscope
Leong, Chee Yong.
Date of Issue2005
School of Mechanical and Aerospace Engineering
Micromachined inertial sensors, consisting of accelerometers and gyroscopes are considered as one of the most highly sought after silicon based micro sensors. Micro- Electro-Mechanical System (MEMS) gyroscopes have attracted a lot of attention for its potential wide range of applications. They can be deployed in automotive applications, such as in navigation, safety and stability system; consumer electronic applications such as video camera stabilization, virtual reality gaming, inertial mouse pointer, etc and military applications. Inspired by the successful commercialization of micromachined accelerometer, various research and industrial institutions have focused on the design and development of high performance and low cost microgyroscope. In this project, a micromachined gyroscope fabricated on SOI wafer is presented.
Nanyang Technological University