Characterization of mechanical properties of microfabricated film.
Khoo, Hwa Seng.
Date of Issue2003
School of Mechanical and Aerospace Engineering
This paper reports on the development of a tester capable of measuring the submicron level deformation of microfabricated films deformed by a compressive force of micro-Newton range.
DRNTU::Engineering::Materials::Mechanical strength of materials
Nanyang Technological University