Large surface profile measurement with instantaneous phase shifting interferometry.
Hui, Wei Kee.
Date of Issue2003
School of Mechanical and Aerospace Engineering
In this research, an optical layout that uses the concept of array of points with a modified Michelson interferometer has been proposed. With this setup, a relatively large surface area can be measured without the need for time consuming scanning. In combination with instantaneous phase shifting arrangement, the system is therefore immune to vibration.
Nanyang Technological University