Design of a laser system for precision measurement.
Chin, Chee Sing.
Date of Issue2000
School of Mechanical and Aerospace Engineering
In the area of precision fabrication, the repeatability requirement is in the range of micrometer or even sub-micrometer. In order to realise this stringent requirement, the ability to perform ultra-precision measurement is crucial. Ultra-precision measurement implies not only the measurement of fabricated products but also the measurement in machine feedback control system.
Nanyang Technological University