Preparation of shape-memory-alloy thin film for actuator
Date of Issue2001
School of Mechanical and Aerospace Engineering
NiTiCu thin films have been successfully prepared through NiTi alloy target and pure copper target. Film composition, microstructure, crystallization, phase transformation behavior, residual stress and lattice parameter of the TiNiCu films were investigated.
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Nanyang Technological University