Micro EDM process.
Chen, Yit Chien.
Date of Issue2005
School of Mechanical and Aerospace Engineering
The development of micro electromechanical systems (MEMS) has demanded various techniques in producing high precision micro mechanical components. Micro EDM plays an important role for its superiority in specific processes, and a complementary role with LIGA processes in creating sophisticated MEMS or micro molds for MEMS components. Studies on machining on silicon and stainless steel micro mechanical components are dominant.
Nanyang Technological University