Studies on digital holography and interferometric application in micromeasurement
Date of Issue2003
School of Mechanical and Aerospace Engineering
With the aim to improve the system performance and further extend the application scope to the rapidly growing microelectromechanical system (MEMS) engineering, the methodology of in-line digital micro-holo-interferometry (IDMHI) is proposed and its performance in micromeasurement is studied in this thesis. In this thesis, the pressure sensor is employed as a typical example.
Nanyang Technological University