View Item 
      •   Home
      • 1. Schools
      • College of Engineering
      • School of Mechanical and Aerospace Engineering (MAE)
      • MAE Theses
      • View Item
      •   Home
      • 1. Schools
      • College of Engineering
      • School of Mechanical and Aerospace Engineering (MAE)
      • MAE Theses
      • View Item
      JavaScript is disabled for your browser. Some features of this site may not work without it.
      Subject Lookup

      Browse

      All of DR-NTUCommunities & CollectionsTitlesAuthorsBy DateSubjectsThis CollectionTitlesAuthorsBy DateSubjects

      My Account

      Login

      Statistics

      Most Popular ItemsStatistics by CountryMost Popular Authors

      About DR-NTU

      Microforce sensor design and fabrication

      Thumbnail
      MAE-THESES_1166.pdf (9.086Mb)
      Author
      Xu, Guoming.
      Date of Issue
      2004
      School
      School of Mechanical and Aerospace Engineering
      Abstract
      Design and fabricate a microforce sensor, with a focus on manufacturability. The microforce range of interest is between 0.1 mN to 100 mN with a bandwidth of going from DC to at least 10 Hz. We use MEMS technology to fabricate silicon cantilever built with build-in piezoresistors in a Wheatstone bridge circuit configuration.
      Subject
      DRNTU::Engineering::Manufacturing::Product engineering
      Type
      Thesis
      Rights
      Nanyang Technological University
      Collections
      • MAE Theses

      Show full item record


      NTU Library, Nanyang Avenue, Singapore 639798 © 2011 Nanyang Technological University. All rights reserved.
      DSpace software copyright © 2002-2015  DuraSpace
      Contact Us | Send Feedback
      Share |    
      Theme by 
      Atmire NV
       

       


      NTU Library, Nanyang Avenue, Singapore 639798 © 2011 Nanyang Technological University. All rights reserved.
      DSpace software copyright © 2002-2015  DuraSpace
      Contact Us | Send Feedback
      Share |    
      Theme by 
      Atmire NV
       

       

      DCSIMG