Microforce sensor design and fabrication

Thumbnail
Author
Xu, Guoming.
Date of Issue
2004
School
School of Mechanical and Aerospace Engineering
Abstract
Design and fabricate a microforce sensor, with a focus on manufacturability. The microforce range of interest is between 0.1 mN to 100 mN with a bandwidth of going from DC to at least 10 Hz. We use MEMS technology to fabricate silicon cantilever built with build-in piezoresistors in a Wheatstone bridge circuit configuration.
Subject
DRNTU::Engineering::Manufacturing::Product engineering
Type
Thesis
Rights
Nanyang Technological University
Collections