Development of condenser silicon microphones using deep RIE micromachining technology.
Date of Issue2002
School of Mechanical and Aerospace Engineering
During the last decade, extensive research work has been carried out to develop microphones on silicon wafers using semiconductor fabrication technology. These micromachined microphones have been proven to be attractive for volume and cost-sensitive applications such as hearing aids and surveillance devices where competition on a cost basis dominates.
Nanyang Technological University