dc.contributor.authorVijendran, M.en_US
dc.date.accessioned2008-09-17T10:47:54Z
dc.date.available2008-09-17T10:47:54Z
dc.date.copyright2001en_US
dc.date.issued2001
dc.identifier.urihttp://hdl.handle.net/10356/5326
dc.description.abstractThe objective of this project work is to implement an Equipment Tracking System for Semiconductor Equipment that will track the real time Machine State of the equipment.en_US
dc.rightsNanyang Technological Universityen_US
dc.subjectDRNTU::Engineering::Manufacturing
dc.titleDesign of a tracking system for semiconductor equipmenten_US
dc.typeThesisen_US
dc.contributor.supervisorSivakumaren_US
dc.contributor.schoolSchool of Mechanical and Aerospace Engineeringen_US
dc.description.degreeMSC(COMPUTER INTEGRATED MANUFACTURING)en_US


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