Defects of thin films on silicon wafer
Tang, Shiau Khee.
Date of Issue2002
School of Materials Science and Engineering
Borophosphosilicate glass (BPSG) is a popular dielectric thin film used in the fabrication of semiconductor devices. However, the addition of dopants like boron and phosphorus creates some defects on these thin films and that reduces the reliability of IC devices. In this work, a systematic investigation was carried out to characterize the defect in BPSG films.
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Nanyang Technological University