A study on the orientated growth, microstructure and thermal conductivity of RF reactively sputtered AIN films.
Date of Issue2005
School of Materials Science and Engineering
In this study AIN films have been deposited by reactive sputtering in argon and nitrogen gas mixture. The orientated growth in the sputtered AIN films has been systematically studied.
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Nanyang Technological University