Fourier transform Raman spectroscopy techniques for engineering and functional polymers in microelectronics industry
Date of Issue2001
School of Materials Science and Engineering
The project aims to establish research infrastructure, i.e., facilities Fourier Transform Infrered Laser Raman (FT-IR-Raman) spectroscopy system. FT-Raman is a powerful technique for characterisation of a wide range of materials particularly engineering and functional polymers in various of shapes and forms. This technique is particularly important in studying materials with symmetric chemical bonding. FT-Raman is a unique technique which uses an infrared laser of wavelength 1064 nm (Nd:Yag laser) instead of visible or UV lasers used in conventional Raman systems. The main objectives of the project are to develop the infrastructure equipment (i.e., FT-Raman system) to support the research in structural and optical property characterisation of conjugated polymers for photonic and microelectronics applications; characterisation of novel stress sensitive polymers for sensor applications; characterisation of novel copolymers as resist for microlithography; and experimental micro- optical stress analysis of films and microelectronics device. Efforts have been focused on capability development of FTIR-Raman techniques for polymer characterisation in terms of hardware, software and other know-how; customising techniques for stress/deformation analysis, opto-mechanical behaviour, structural and chemical analysis using Raman spectrometer, and ultimated developing novel diacetylene-containing copolymers that have potential applications as optical strain sensors (using Raman scattering as the diagnostic signals) and novel resists for microlithography. Upon developing the capability, there was follow-up collaboration with Chartered Semiconductors Manufacturing Pte Ltd on characterisation of low-k dielectric materials and chemical amplified photo resists.
DRNTU::Engineering::Materials::Material testing and characterization
Nanyang Technological University