Improvement on the uniformity and deviation of structured patterns for surface acoustic wave filters.
Ong, Eunice Ho Hui.
Date of Issue2005
School of Electrical and Electronic Engineering
This project is carried out with the main purpose of improving line-width uniformity and deviation across each wafer through optimization of the photolithography processes. In order to remain price competitive in the chip market, this project is also aimed at reducing production costs.
DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging
Nanyang Technological University