Corrosion scrap reduction from AMT8330
Ng, Ti Koon.
Date of Issue2002
School of Electrical and Electronic Engineering
In this report, the author writes on a project carried out in Chartered Semiconductor Mfg Ltd, which helps to reduce the scrapping of wafers due to corrosion of the metal interconnects.
DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
Nanyang Technological University