Power MOSFET yield improvement through the improvement and refinement of epitaxy process
Ng, Kin Meng.
Date of Issue2003
School of Electrical and Electronic Engineering
The work involved in this project is yield improvement of Power MOSFET (PMOS) wafers manufactured in STMicroelectronics. The yield improvement was achieved through the improvement and refinement of Epitaxy process.
DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
Nanyang Technological University