Novel structures and materials for microelectromechanical system (MEMS) devices
Low, Duong Sin.
Date of Issue2002
School of Electrical and Electronic Engineering
In this thesis, novel Silicon-based MEMS actuator structures are presented, together with a study on the feasibility of using III-V compound semiconductor materials for the fabrication of MEMS devices.
DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
Nanyang Technological University