Development of high dielectric constant SrTiO3 thin films
Loo, Martin Chih Chien.
Date of Issue2002
School of Electrical and Electronic Engineering
This thesis presents the effect of certain process conditions in the overall performance of SrTiO3 dielectric thin films deposited by Radio Frequency (RF) sputtering techniques.
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Nanyang Technological University