Salicidation : impact on yield.
Lim, Nigel Kheck Han.
Date of Issue2004
School of Electrical and Electronic Engineering
The mechanism and solution of yield drop related to CoSi2/poly LI were studied in depth. Three experiments were carried out to understand and address the low yield of one product running on 0.18 pm CoSi2 process.
DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
Nanyang Technological University