Study of elasto-polymer for supercritical CO2 wafer processing.
Date of Issue2005
School of Electrical and Electronic Engineering
Carbon dioxide (CO2) is one of the most common candidates of Supercritical Fluids (SCFs). It has a number of advantages, such as low human toxicity, no solvent waste, low cost, ready availability, complete recovery of extracted agents and extracted substances, environmental acceptability, complete and ready recycling, etc. It has been widely studied as a cleaning solvent for many decades to replace large amounts of toxic chemicals and as replacement of water in semiconductor processes in recent year.
DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging
Nanyang Technological University