Fabrication and characterization of ISFET for PH measurements
Date of Issue2003
School of Electrical and Electronic Engineering
We have successfully fabricated, assembled and characterized the ISFET devices for pH measurement. After electrical measurement on wafer-level to confine the wafer fabrication process, the fabricated wafer was cut into individual ISFET dice. The ISFET dice was then mounted on printing circuit board (PCB).
DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
Nanyang Technological University