Plasma induced quantum well intermixing for photonic integration.
Hery Susanto Djie.
Date of Issue2005
School of Electrical and Electronic Engineering
In this thesis, Ar plasma induced intermixing has been developed with various plasma systems, including Inductively Coupled Plasma (ICP) machine. A plasma induced QWI technique has been demonstrated to successfully tune a wide range of III-V compound semiconductor materials for photonic integration applications.
DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
Nanyang Technological University