Optical coatings using filtered cathodic vacuum arc technique
Choong, Yoon Shin.
Date of Issue1999
School of Electrical and Electronic Engineering
The objectives of this thesis are to stabilize the cathode source and also deposit stoichiometric aluminum oxide films. Firstly, the arc spot phenomena is study and what parameters influence the stability of the arc are conducted in experiments.
DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
Nanyang Technological University