Fabrication of high aspect-ratio polysilicon microstructures for microsystem techonology applications
Chong, Gang Yih.
Date of Issue2002
School of Electrical and Electronic Engineering
A novel fabrication technology for high aspect-ratio polysilicon (HARP) microstructures was developed for the fabrication of inertial sensors such as accelerometer or gyroscope.
DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
Nanyang Technological University