Design and fabrication of an optical accelerometer using silicon micro-machining.
Chiu, Man Ming.
Date of Issue2001
School of Electrical and Electronic Engineering
The project is a feasibility study for a new type of accelerometer with photodiode as the displacement sensing device in combination with suspended flexure structure to form the new type of device, the surface micromachined optical accelerometer.
DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
Nanyang Technological University