Verification of selected electron beam induced current (EBIC) techniques
Ang, Alex Yong Guan
Date of Issue2003
School of Electrical and Electronic Engineering
The diffusion lengths of materials within semiconductor devices have a very strong impact on device performance. Therefore, there is a need to establish a method that is capable of determining the diffusion length accurately within a semiconductor device. By using the scanning electron microscope (SEM) operating in the electron beam-induced current (EBIC) mode.
DRNTU::Engineering::Electrical and electronic engineering::Semiconductors
Nanyang Technological University