A study on ion implant uniformity.
Chen, Xiao Song.
Date of Issue2003
School of Electrical and Electronic Engineering
As a result of the recombination of electrons with the positive dopant ion species, neutral dopant atoms (no charge) are created during the process of ion being injected into wafer. Since the Faraday System (an instrument to measure Beam current) can only count charged atoms, the neutral dopant atoms are not counted resulting in an inaccurate dose measurement.
DRNTU::Engineering::Electrical and electronic engineering::Semiconductors
Nanyang Technological University