Material characterization and device design of TiNx infrared microemitter
Wang, Jun Min.
Date of Issue2004
School of Electrical and Electronic Engineering
This thesis systematically studies the electrical and thermal properties of TiN films deposited by the filtered arc deposition (FAD) method. The properties of deposited TiN films are analyzed by means of multiple characterization tools.
DRNTU::Engineering::Electrical and electronic engineering
Nanyang Technological University