Modeling and design of high sensitive PZT microsystems
Date of Issue2007
School of Mechanical and Aerospace Engineering
Design of microsystems involves knowledge of mechanical, electrical and material domains. To start with modeling and design of microsystems an analytical approach along with FEM is essential. For our objective we have carried out an analytical study of the tip deflection for piezoelectric micro-actuator, along with the design analysis using FEA commercial tool ANSYS®. We have observed the relation between sensitivity and tip deflection by introducing IDE (Inter Digitated Electrode) to induce in-plane piezoelectric effect. The comparative study between transverse and longitudinal mode has been conducted by considering the silicon thickness as the effective parameter. The simulated and analytical results show that the longitudinal mode is several times higher than the conventional transverse mode. In later part, we have also demonstrated the fabrication process of our device using MEMS design tool IntelliFab®.