Implementing plasma induced damage rules in design.
Tay, Hwee Chua.
Date of Issue2003
School of Electrical and Electronic Engineering
This dissertation aims to help understand the principles of the plasma-induced damage mechanism and its measurement methods. It is organized into a few chapters to introduce to the readers on the fundamentals, measurements, experiment and findings of plasma-induced damage observe in the manufacturing line in IC industry.
DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
Nanyang Technological University