Frabrication of microlens array in sol-gel glass
Tan, Chee Wee.
Date of Issue2004
School of Electrical and Electronic Engineering
The fabrication of micro lens array pattern using UV contact printing followed by thermal reflow. Soft lithography was used as the technique to transfer the master pattern to optical materials like SU8 and sol-gel.
DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
Nanyang Technological University