Micromachined pyroelectric infrared detector based on ferroelectric thin films
Sun, Ling Ling.
Date of Issue2003
School of Electrical and Electronic Engineering
In this thesis, micromachined pyroelectric infrared detectors based on a novel PZT/PT multilayer ferroelectric thin film have been successfully developed.
DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials
Nanyang Technological University