Formation of silicon nodules and the different methods of removing them.
Chan, Ching Kok.
Date of Issue2002
School of Electrical and Electronic Engineering
Experiments have been done on the use of different metallization target, different metallization scheme and deposition temperature to characterize on the silicon nodule defect. This report summarizes on the investigation on the silicon precipitation problem.
DRNTU::Engineering::Electrical and electronic engineering::Integrated circuits
Nanyang Technological University