Demonstration lithography using plasma focus soft x-ray source
Wong, Terence Kin Shun
Lee, Paul Choon Keat
Springham, Stuart V.
Gribkov, Vladimir A.
Rajdeep Singh Rawat
Date of Issue2000
School of Electrical and Electronic Engineering
To demonstrate the soft x-ray source(SXR) developed and to gain experience in handling SXR masks and resists.
DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging
Nanyang Technological University