Development of electron beam lithography process for the design and fabrication of sub-micron GaAs-based RF devices.
Yoon, Soon Fatt.
Date of Issue2000
School of Electrical and Electronic Engineering
This report presents the device fabrication and characterisation of the InxGa1-xP/In0.20Ga0.80As HEMT.
DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging
Nanyang Technological University