Internal microprobing at VLSI chips
Liu, Po Ching.
Chin, Edward Hsi Ling.
Date of Issue1990
School of Electrical and Electronic Engineering
Microprobing is the technique suitable to detect and measureinternal signals inside the VLSI chips. The setup comprises of a microprobing station, micromanipulators and probes. DC (static) and AC (dynamic) measurements on some VLSI chips to prove the establishment and application of microprobing techniques are presented.
DRNTU::Engineering::Electrical and electronic engineering::Integrated circuits
Nanyang Technological University