Development of amorphous silicon carbide semiconductor thin films for optoelectronic device applications.
Yoon, Soon Fatt.
Date of Issue1999
School of Electrical and Electronic Engineering
Its primary objective was to investigate the use of the electron cyclotron resonance chemical vapour deposition (ECR-CVD) technique to deposit amorphous and microcrystalline hydrogenated silicon carbide films (SiC:H) with a view for the eventual use of such films for optoelectronic applications.
DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
Nanyang Technological University