Carbon-based composite coatings produced by filtered cathodic vacuum arc
Tay, Beng Kang
Lau, Daniel Shu Ping
Date of Issue2002
School of Electrical and Electronic Engineering
Metal-containing amorphous carbon (a-C: Me) nanocomposite films, including a-C:A1, a-C:Ti, a-C:W, a-C:Fe and a-C:Co films, were prepared by filtered cathodic vacuum arc technique using metal-containing graphite targets.
DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics
Nanyang Technological University